OBSERVATION OF PN JUNCTIONS ON IMPLANTED SILICON USING A SCANNING TUNNELING MICROSCOPE

被引:76
作者
HOSAKA, S
HOSOKI, S
TAKATA, K
HORIUCHI, K
NATSUAKI, N
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D O I
10.1063/1.99876
中图分类号
O59 [应用物理学];
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页码:487 / 489
页数:3
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