PHYSICS AND APPLICATIONS OF CHARGED-PARTICLE BEAM SOURCES

被引：18

作者：

HAMILTON, GW

BACAL, M

机构：

[1] Laboratoire de Physique des Milieux Ionises, Laboratiore du CNRS, Ecole Polytechnique

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1991年 / 19卷 / 06期

关键词：

D O I：

10.1109/27.125037

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

We review the physics and a few applications of charged particle beam sources, most of which originate from, propagate through, or use as a target, a partially ionized plasma. The applications covered are those of accelerator sources and ion implantation.

引用

页码：1143 / 1151

页数：9

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