SURFACE-MORPHOLOGY AND CRYSTAL-STRUCTURES OF AS-GROWN BISRCACUO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING FROM 3 TARGETS

被引:32
作者
KURODA, K [1 ]
KOJIMA, K [1 ]
TANIOKU, M [1 ]
YOKOYAMA, K [1 ]
HAMANAKA, K [1 ]
机构
[1] MITSUBISHI ELECTR CO,MAT RES LAB,AMAGASAKI,HYOGO 661,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1989年 / 28卷 / 09期
关键词
D O I
10.1143/JJAP.28.1586
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1586 / 1592
页数:7
相关论文
共 12 条
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