SILICON AS A MECHANICAL MATERIAL

被引：2041

作者：

PETERSEN, KE ^{[1
]}

机构：

[1] IBM CORP, RES LAB, SAN JOSE, CA 95193 USA

来源：

PROCEEDINGS OF THE IEEE | 1982年 / 70卷 / 05期

关键词：

D O I：

10.1109/PROC.1982.12331

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：420 / 457

页数：38

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