ELLIPSOMETRIC INVESTIGATION OF VERY THIN HOMOGENEOUS AND ABSORBING FILMS - ANALYSIS OF EXPERIMENTAL-DATA

被引：2

作者：

AGIUS, B ^{[1
]}

SIEJKA, J ^{[1
]}

机构：

[1] ECOLE NORM SUPER,GRP PHYS SOLIDES,F-75221 PARIS 5,FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1977年 / 12卷 / 08期

关键词：

D O I：

10.1051/rphysap:019770012080117100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1171 / 1180

页数：10

共 33 条

[1]

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[3]

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[4]

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[8]

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[9]

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[10] ELLIPSOMETRIC FUNCTION OF A FILM-SUBSTRATE SYSTEM - APPLICATIONS TO DESIGN OF REFLECTION-TYPE OPTICAL DEVICES AND TO ELLIPSOMETRY [J].

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