SOME EFFECTS OF HETEROATOM SIZE AND REACTIVITY ON LOW-ENERGY ION-IMPLANTATION IN DIAMOND, REVEALED BY X-RAY-INDUCED ELECTRON-SPECTROSCOPY AND OXIDATIVE DEPTH PROFILING

被引：9

作者：

EVANS, S

机构：

来源：

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1980年 / 370卷 / 1740期

关键词：

D O I：

10.1098/rspa.1980.0025

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：107 / 129

页数：23

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