FLUID MODEL SIMULATIONS OF A 13.56-MHZ RF DISCHARGE - TIME AND SPACE DEPENDENCE OF RATES OF ELECTRON-IMPACT EXCITATION

被引：129

作者：

GRAVES, DB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 01期

关键词：

D O I：

10.1063/1.339111

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：88 / 94

页数：7

共 14 条

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