ION-BEAM-INDUCED METASTABLE PT2SI3 PHASE .2. KINETICS AND MORPHOLOGY

被引：24

作者：

TSAUR, BY

MAYER, JW

GRACZYK, JF

TU, KN

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[2] CALTECH,PASADENA,CA 91125

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 10期

关键词：

D O I：

10.1063/1.327447

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5334 / 5341

页数：8

共 13 条

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[9] ION-BEAM INDUCED METASTABLE PT2SI3 PHASE .1. FORMATION, STRUCTURE, AND PROPERTIES [J].

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