MEASURING PROFILE AND POSITION BY MEANS OF VIBRATING QUARTZ RESONATORS USED AS TACTILE AND NONTACTILE SENSORS

被引：7

作者：

WEINMANN, M ^{[1
]}

RADIUS, R ^{[1
]}

ASSMUS, F ^{[1
]}

ENGELHARDT, W ^{[1
]}

机构：

[1] HAHN SCHICKARD INST FEINWERK & ZEITMESSTECH STUTTGART,W-7000 STUTTGART 1,GERMANY

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1993年 / 37-8卷

关键词：

D O I：

10.1016/0924-4247(93)80121-V

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new principle has been developed for the measurement of both profile and position. The sensors are vibrating quartz resonators. The closer they are to a surface the more they are damped due to the air viscosity. This characteristic can be either used for a nontouching profilometer unit or for a very low loaded contact 3D-coordinate measuring process. The principle is detailed as well as the oscillator circuits used and some significant experimental results.

引用

页码：715 / 722

页数：8