MEASUREMENTS OF SPUTTER RATE OF FUSED SILICA BOMBARDED BY ARGON IONS OF ENERGY 12-32-KEV

被引：20

作者：

EDWIN, RP ^{[1
]}

机构：

[1] NATL PHYS LAB,DIV MECH & OPTICAL METROL,TEDDINGTON,MIDDLESEX,ENGLAND

来源：

关键词：

D O I：

10.1088/0022-3727/6/7/306

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：833 / &

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