POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY

被引：96

作者：

BARRAUD, A

ROSILIO, C

RUAUDELTEIXIER, A

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(80)90139-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：91 / 98

页数：8

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