ENERGY EFFICIENCY OF LEAD SELF-SPUTTERING

被引：10

作者：

ANDERSEN, HH

机构：

[1] Physics Department, AEC Risø, Roskilde

来源：

APPLIED PHYSICS LETTERS | 1968年 / 13卷 / 03期

关键词：

D O I：

10.1063/1.1652526

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The sputtering efficiency (i.e. ratio between sputtered energy and impinging ion energy) has been measured for 30-75-keV lead ions impinging on polycrystalline lead. The results are in good agreement with recent theoretical estimates. © 1968 The American Institute of Physics.

引用

页码：85 / &

共 9 条

[1] SPUTTERING EXPERIMENTS IN THE HIGH ENERGY REGION [J].

ALMEN, O ;

BRUCE, G .

NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02) :279-289

[2]

ANDERSEN HH, 1966, MAT FYS MED DAN VID, V35

[3]

ANDERSEN HH, 1965, 93 RIS REP

[4] FESTKORPERZERSTAUBUNG DURCH IONENBESCHUSS [J].

BEHRISCH, R .

ERGEBNISSE DER EXAKTEN NATURWISSENSCHAFTEN, 1964, 35 :295-443

[5]

GLOTIN P, 1967, P INT C APPLICATI ED, P215

[6]

LINDHARD J, 1963, MAT FYS MED DAN VID, V33

[7] SPUTTERING EFFICIENCY OF AMORPHOUS SUBSTANCES [J].

SIGMUND, P .

CANADIAN JOURNAL OF PHYSICS, 1968, 46 (06) :731-&

[8]

SIGMUND P, 1967, P INT C APPLICATIONS, P215

[9]

SIGMUND P, 1968, BNL50083

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