MODELING OF A SELF-SUSTAINED DISCHARGE-EXCITED ARF EXCIMER-LASER

被引:17
作者
AKASHI, H
SAKAI, Y
TAGASHIRA, H
机构
[1] Department of Electrical Engineering, Hokkaido University, Sapporo
关键词
D O I
10.1088/0022-3727/27/6/003
中图分类号
O59 [应用物理学];
学科分类号
摘要
A one-dimensional model including Poisson's equation to consider the space-charge for a discharge-excited ArF excimer laser has been developed. Behaviour of the field distortion by the space-charge and its effect on discharge evolution in the cathode sheath region have been studied. It was shown that the electric field near the cathode was extremely distorted due to the positive space-charge and became approximately 300 kV cm-1 at the period of laser oscillation, though the maximum of the external field was approximately 20 kV cm-1. This high field may suggest that a local filamentation starts from the cathode by field emission, if a microscopic protuberance is on the cathode surface. The photoelectron emission from the cathode was shown to be essential to moderate the field distortion in the cathode region and to sustain high-power-large-volume discharges. The decrease in the preionization density caused an increase in the electric field in the cathode at the final stage of the discharge, and an increase in the maximum values of the ArF* and electron number densities.
引用
收藏
页码:1097 / 1106
页数:10
相关论文
共 22 条
[1]  
[Anonymous], 1973, MOBILITY DIFFUSION I
[2]   CATHODE SHEATH FORMATION IN A DISCHARGE-SUSTAINED XECL LASER [J].
BELASRI, A ;
BOEUF, JP ;
PITCHFORD, LC .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) :1553-1567
[3]   STABILITY OF TRANSVERSE SELF-SUSTAINED DISCHARGE-EXCITED LONG-PULSE XECL LASERS [J].
COUTTS, J ;
WEBB, CE .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (03) :704-710
[4]  
DATE H, 1988, 9 INT C GAS DISCH TH, P705
[5]   A CONTINUUM MODEL OF DC AND RF DISCHARGES [J].
GRAVES, DB ;
JENSEN, KF .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1986, 14 (02) :78-91
[6]   THEORETICAL STUDIES OF UV-PREIONIZED TRANSVERSE DISCHARGE KRF AND ARF LASERS [J].
GREENE, AE ;
BRAU, CA .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1978, 14 (12) :951-957
[7]   ABINITIO STUDY OF DISSOCIATIVE ATTACHMENT OF LOW-ENERGY ELECTRONS TO F2 [J].
HAZI, AU ;
OREL, AE ;
RESCIGNO, TN .
PHYSICAL REVIEW LETTERS, 1981, 46 (14) :918-922
[8]  
Kuchinskii A. A., 1989, Soviet Journal of Quantum Electronics, V19, P1068, DOI 10.1070/QE1989v019n08ABEH008780
[9]   NONLINEAR EXPANSION OF THE CATHODE REGION IN ATMOSPHERIC-PRESSURE GLOW-DISCHARGE [J].
KULIKOVSKY, AA .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (03) :431-435
[10]   MICROARCS AS A TERMINATION MECHANISM OF OPTICAL PULSES IN ELECTRIC-DISCHARGE-EXCITED KRF EXCIMER LASERS [J].
KUSHNER, MJ .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :387-399