MODELING OF A RADIO-FREQUENCY PLASMA TORCH INCLUDING A SELF-CONSISTENT ELECTROMAGNETIC-FIELD FORMULATION

被引：17

作者：

CHEN, X

机构：

来源：

关键词：

D O I：

10.1088/0022-3727/22/2/021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：361 / 363

页数：3

共 12 条

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