SPUTTERING OF THIN PYRITE FILMS

被引:65
作者
BIRKHOLZ, M [1 ]
LICHTENBERGER, D [1 ]
HOPFNER, C [1 ]
FIECHTER, S [1 ]
机构
[1] BEREICH PHOTOCHEM ENERGIEUMWANDLUNG,MAT FORSCHUNG ABT,HAHN MEITNER INST,W-1000 BERLIN 39,GERMANY
关键词
D O I
10.1016/0927-0248(92)90086-5
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
Argon and reactive ion beam sputtering of thin pyrite (FeS2) and other iron sulfide films is reported. Films were characterized by X-ray diffraction, Rutherford backscattering, measurements of the temperature-dependent conductivity and optical spectroscopy.
引用
收藏
页码:243 / 251
页数:9
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