DEPOSITION OF WURTZITE TYPE BORON-NITRIDE LAYERS BY REACTIVE PULSE PLASMA CRYSTALLIZATION

被引：90

作者：

SOKOLOWSKI, M

机构：

来源：

关键词：

D O I：

10.1016/0022-0248(79)90121-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：136 / 138

页数：3

共 9 条

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[2] DIRECT TRANSFORMATION OF HEXAGONAL BORON NITRIDE TO DENSER FORMS
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[3] Dulin I. N., 1969, Fizika Tverdogo Tela, V11, P1252
[4] HART PJ, 1962, PHYS FLUIDS, V5, P1
[5] LOCHTEHOLTGREWE.W, 1968, PLASMA DIAGNOSTIC
[6] SAMSONOV GW, 1969, NITRIDY, P256
[7] CRYSTALLIZATION FROM A REACTIVE PULSE PLASMA
SOKOLOWSKI, M
SOKOLOWSKA, A
MICHALSKI, A
GOKIELI, B
ROMANOWSKI, Z
RUSEK, A
[J]. JOURNAL OF CRYSTAL GROWTH, 1977, 42 (DEC) : 507 - 511
[8] CUBIC FORM OF BORON NITRIDE
WENTORF, RH
[J]. JOURNAL OF CHEMICAL PHYSICS, 1957, 26 (04) : 956 - 956
[9] WENTORF RH, 1965, SCIENCE, V147, P45