METHOD FOR THE PREPARATION OF PROTECTIVE COATINGS BY LOW-TEMPERATURE METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION (MOCVD)

被引：8

作者：

KALOYEROS, AE

WILLIAMS, WS

CONSTANT, G

机构：

[1] UNIV ILLINOIS,DEPT CERAM ENGN,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1988年 / 59卷 / 07期

关键词：

D O I：

10.1063/1.1139698

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1209 / 1214

页数：6

共 23 条

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[3]

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[4]

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[7] AMORPHOUS TRANSITION-METAL CARBIDES [J].

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[8] APPLICATION OF MOLECULAR (STATIC) SECONDARY ION MASS-SPECTROSCOPY TO DETECTION OF ORGANIC-MOLECULES IN AMORPHOUS TITANIUM CARBIDE [J].

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[9]

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[10]

KALOYEROS AE, 1987, THESIS U ILLINOIS UR

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