SOFT MAGNETIC-PROPERTIES OF BCC FE-ZR-B SPUTTERED FILMS WITH NANOSCALE GRAIN-SIZE

被引：23

作者：

MAKINO, A ^{[1
]}

SUZUKI, K ^{[1
]}

INOUE, A ^{[1
]}

MASUMOTO, T ^{[1
]}

机构：

[1] TOHOKU UNIV,INST MAT RES,SENDAI,MIYAGI 980,JAPAN

来源：

MATERIALS TRANSACTIONS JIM | 1992年 / 33卷 / 01期

关键词：

IRON-ZIRCONIUM-BORON ALLOY; SPUTTERED FILM; AMORPHOUS PHASE; CRYSTALLIZATION; NANOCRYSTALLINE BCC STRUCTURE; HIGH MAGNETIZATION; REDUCED MAGNETOSTRICTION; HIGH PERMEABILITY;

D O I：

10.2320/matertrans1989.33.80

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A nanoscale bcc film with a grain size of 10 to 20 nm was found to be prepared by annealing sputtered Fe-Zr-B amorphous films with solute contents of 4 to 9 at% Zr and 1 to 6 at% B for 3.6 ks in the temperature range of 823 to 923 K. The bcc Fe89.6Zr7.7B2.7 film obtained by annealing at 923 K exhibits a high magnetization (B800) of 1.64 T at an applied field of 800 kA/m and a high permeability (mu(e)) of 3200 at 1 MHz. It is notable that the B800 and mu(e) values are comparable to the highest values for various kinds of soft magnetic films reported so far. The reason for the appearance for the good soft magnetic properties is presumably due to the decrease in apparent magnetic anisotropy by the formation of the nanocrystalline bcc structure and the reduction of magnetostriction caused by the dissolution of Zr into the bcc phase.

引用

页码：80 / 86

页数：7

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