USE OF AN ULTRAHIGH-VACUUM BALANCE FOR THE QUANTITATIVE ASSAY OF EVAPORATED REFERENCE LAYERS

被引:9
作者
ESCHBACH, HL
MITCHELL, IV
LOUWERIX, E
机构
关键词
D O I
10.1016/0040-6031(81)87048-7
中图分类号
O414.1 [热力学];
学科分类号
摘要
引用
收藏
页码:33 / 43
页数:11
相关论文
共 15 条
  • [1] BRULMANS J, 1976, CBNMAS0976 INT REP
  • [2] ESCHBACH H, 1980, 8TH P INT VAC C CANN, V1, P267
  • [3] ESCHBACH HL, 1968, VAKUUM-TECH, V17, P29
  • [4] PREPARATION OF STANDARD LAYERS BY VACUUM EVAPORATION
    ESCHBACH, HL
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1972, 102 (03): : 469 - &
  • [5] ESCHBACH HL, 1965, VACUUM MICROBALANCE, V5, P207
  • [6] ESCHBACH HL, 1969, VIDE, P97
  • [7] Maissel L.I., 1970, HDB THIN FILM TECHNO
  • [8] STANDARDS FOR BACKSCATTERING ANALYSIS
    MITCHELL, IV
    ESCHBACH, HL
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 727 - 733
  • [9] MORET H, 1970, VACUUM MICROBALANCE, V7, P173
  • [10] MORET H, 1965, VAC MICROBALANCE TEC, V5, P59