High frequency dielectric properties of thin-film PZT capacitors

被引：12

作者：

Williamson, W

Gilbert, BK

Chen, HD

Udayakumar, KR

Cross, LE

Bozler, CM

机构：

[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802

[2] MIT,LINCOLN LAB,HIGH SPEED MICROELECTR GRP,LEXINGTON,MA 02173

来源：

INTEGRATED FERROELECTRICS | 1995年 / 10卷 / 1-4期

关键词：

D O I：

10.1080/10584589508012291

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a method for calculating the dielectric constant and the dissipation factor for thin-film ferroelectric capacitors from scattering parameter measurements at multi-gigahertz frequencies. Physical measurement is discussed along with description of the model upon which the calculation is based. Experimental results for 0.5 micron films of PZT are reported up to 15 GHz. Direct measurement is compared with indirectly calculated values at the 100 MHz to 1.5 GHz range, showing excellent agreement.

引用

页码：335 / 342

页数：8

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