TRAPPING DYNAMICS IN REACTIVE GAS SURFACE SCATTERING - IMPORTANCE OF PARALLEL MOMENTUM ACCOMMODATION

被引:29
作者
DELOUISE, LA
机构
[1] Xerox Webster Research Center, Webster, NY 14580, 800 Phillips Road
关键词
D O I
10.1016/0009-2614(91)87132-U
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The trapping probability of Cl2 on a Cl-adatom-covered GaAs{110} surface is measured as a function of incident kinetic energy and angle for a room temperature surface. The trapping probability decreases with increasing kinetic energy in a manner that depends on the incident angle such that a larger probability is observed at more normal angles of incidence. This behavior is interpreted as indicating a primary importance of parallel momentum accommodation in the trapping dynamics of this reactive gas/surface system.
引用
收藏
页码:149 / 155
页数:7
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