INTERPRETATION OF IMPEDANCE PROPERTIES OF ANODE-SURFACE FILM IN ELECTROPOLISHING OF COPPER IN PHOSPHORIC-ACID

被引:30
作者
KOJIMA, K
TOBIAS, CW
机构
[1] UNIV CALIFORNIA,INORG MAT RES DIV,LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
[2] UNIV CALIF,DEPT CHEM ENGN,BERKELEY,CA 94720
关键词
D O I
10.1149/1.2403661
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1202 / 1205
页数:4
相关论文
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