IMPLICATIONS IN THE USE OF REACTIVE ION-BOMBARDMENT FOR SECONDARY ION YIELD ENHANCEMENT

被引：38

作者：

WITTMAACK, K

机构：

来源：

关键词：

D O I：

10.1016/0378-5963(81)90045-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：315 / 334

页数：20

共 50 条

[1]

Andersen CA., 1970, INT J MASS SPECTROM, V3, P413, DOI [10.1016/0020-7381(70)80001-8, DOI 10.1016/0020-7381(70)80001-8]

[2]

ANDERSEN CA, 1969, INT J MASS SPECTROM, V2, P61

[3]

Andersen H. H., 1981, Sputtering by particle bombardment I. Physical sputtering of single-element solids, P145

[4]

BAY HL, 1979, RADIAT EFF DEFECT S, V41, P77, DOI 10.1080/00337577908236950

BENNINGHOVEN, A .

[6]

BERNHEIM M, 1978, SECONDARY ION MASS S, V2, P40

[7]

Biersack J. P., 1973, Radiation Effects, V19, P249, DOI 10.1080/00337577308232256

BLANK, P ;

WITTMAACK, K ;

SCHULZ, F .

NUCLEAR INSTRUMENTS & METHODS, 1976, 132 (JAN-F) :387-392

BLANK, P ;

WITTMAACK, K .

[10]

Bottiger J., 1971, Radiation Effects, V11, P69, DOI 10.1080/00337577108230451