MEASUREMENTS OF PLASMA PARAMETERS IN A HIGH-FREQUENCY GLOW DISCHARGE USING ORIFICE PROBE

被引：15

作者：

HIRAOKA, K

KAMADA, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1971年 / 10卷 / 03期

关键词：

D O I：

10.1143/JJAP.10.339

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：339 / +

页数：1

共 14 条

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