CHARACTERIZATION OF LONG-PERIODIC LAYERED STRUCTURES BY X-RAY DIFFRACTION-IV - SMALL-ANGLE X-RAY-DIFFRACTION FROM A SUPERLATTICE WITH NONIDEAL INTERFACES

被引：22

作者：

SASANUMA, Y ^{[1
]}

UCHIDA, M ^{[1
]}

OKADA, K ^{[1
]}

YAMAMOTO, K ^{[1
]}

KITANO, Y ^{[1
]}

ISHITANI, A ^{[1
]}

机构：

[1] TORAY RES CTR LTD,OTSU,SHIGA 520,JAPAN

来源：

THIN SOLID FILMS | 1991年 / 203卷 / 01期

关键词：

D O I：

10.1016/0040-6090(91)90522-Y

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The small angle X-ray diffraction intensity of superlattices (SLs) has been formulated on the basis of a trapeziform composition profile. The analysis using this model enables us to estimate the interface width as well as the layer thicknesses. A GaAs/AlAs SL was characterized according to this method, and the SL period was precisely determined with consideration of the effect of refraction. The scheme presented here has been shown to be useful for studies on structural modifications of SLs with a long period as large as tens of nanometres.

引用

页码：113 / 120

页数：8

共 7 条

[1] X-RAY-DIFFRACTION STUDY OF INTER-DIFFUSION AND GROWTH IN (GAAS)N(AIAS)M MULTILAYERS [J].