PHOTORESIST CHANNEL-CONSTRAINED DEPOSITION OF ELECTROLESS METALLIZATION ON LIGATING SELF-ASSEMBLED FILMS

[1] ARKLES B, 1992, 1992 HULS SILICON CO, P59

[2] BRANDOW SL, UNPUB

[3] CALABRESE GS, Patent No. 8111640

[4] LITHOGRAPHIC PATTERNING OF SELF-ASSEMBLED FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2155 - 2163

[5] PROJECTION X-RAY-LITHOGRAPHY WITH ULTRATHIN IMAGING LAYERS AND SELECTIVE ELECTROLESS METALLIZATION [J]. OPTICAL ENGINEERING, 1993, 32 (10) : 2437 - 2445

[6] CALVERT JM, 1994, ACS SYM SER, V537, P210

[7] CALVERT JM, 1992, MATER RES SOC SYMP P, V260, P905, DOI 10.1557/PROC-260-905

[8] CALVERT JM, 1991, SOLID STATE TECHNOL, V34, P77

[9] CALVERT JM, UNPUB

[10] CHO JSH, 1993, B MATER RES SOC, P31

[1] ARKLES B, 1992, 1992 HULS SILICON CO, P59

[2] BRANDOW SL, UNPUB

[3] CALABRESE GS, Patent No. 8111640

[4] LITHOGRAPHIC PATTERNING OF SELF-ASSEMBLED FILMS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2155 - 2163

[5] PROJECTION X-RAY-LITHOGRAPHY WITH ULTRATHIN IMAGING LAYERS AND SELECTIVE ELECTROLESS METALLIZATION [J]. OPTICAL ENGINEERING, 1993, 32 (10) : 2437 - 2445

[6] CALVERT JM, 1994, ACS SYM SER, V537, P210

[7] CALVERT JM, 1992, MATER RES SOC SYMP P, V260, P905, DOI 10.1557/PROC-260-905

[8] CALVERT JM, 1991, SOLID STATE TECHNOL, V34, P77

[9] CALVERT JM, UNPUB

[10] CHO JSH, 1993, B MATER RES SOC, P31