THICKNESS DEPENDENCE OF ELECTRICAL CONDUCTIVITY IN VACUUM DEPOSITED COPPER FILMS

被引:6
作者
REALE, C
机构
[1] Centro Ricerche Pellicole Sottili Metal Lux, Milan, Italy
关键词
D O I
10.1109/PROC.1969.7470
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The size dependence of the conductivity observed in vacuum condensed copper films 200–1500 Å thick was interpreted by applying the Sondheimer theory on the assumption that the scattering of the carriers by the film boundaries is partially elastic. The fraction of electrons specularly reflected at the surfaces was determined by a method based on the anomalous skin effect. Copyright © 1969 by The Institute of Electrical and Electronics Engineers, Inc.
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页码:2073 / &
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