COMMENTS ON COMPUTER SIMULATION OF SPUTTERING

被引：13

作者：

ROBINSON, MT

机构：

来源：

关键词：

D O I：

10.1063/1.1658052

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2670 / &

共 15 条

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