SURFACE PROFILE ANALYSIS BY HELIUM-3 ACTIVATION . OXYGEN IN SILICON

被引:18
作者
LAMB, JF
LEE, DM
MARKOWIT.SS
机构
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D O I
10.1021/ac60284a026
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:212 / &
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