TOPOGRAPHIC IMAGING OF GAAS-MICROSTRUCTURED SAMPLES BY STM AND SEM

被引：6

作者：

GOMEZRODRIGUEZ, JM ^{[1
]}

VAZQUEZ, L ^{[1
]}

BARTOLOME, A ^{[1
]}

BARO, AM ^{[1
]}

GRAMBOW, P ^{[1
]}

HEITMANN, D ^{[1
]}

机构：

[1] MAX PLANCK INST,D-7000 STUTTGART 80,FED REP GER

来源：

ULTRAMICROSCOPY | 1989年 / 30卷 / 03期

关键词：

D O I：

10.1016/0304-3991(89)90065-X

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

收藏

页码：355 / 358

页数：4

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