DYNAMIC LASER-BEAM TESTING OF A N-MOS DEVICE

被引：1

作者：

BERGNER, H

HEMPEL, K

KRAUSE, A

STAMM, U

机构：

[1] Friedrich Schiller University Jena Faculty of Physics, Astronomy Institute of Optics and Quantum Electronics, O- 6900 Jena

来源：

MICROELECTRONIC ENGINEERING | 1991年 / 15卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(91)90192-G

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An IC consisting of a n-MOS inverter chain was investigated with the time-resolved OBIC method. The temporal shape of the electrical response to a 100 ps laser pulse and the propagation of the generated electrical pulse in the chain was studied.

引用

页码：109 / 112

页数：4

共 7 条

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