APPLICATION OF MODERN CONTROL-THEORY TO TEMPERATURE CONTROL OF THE MBE SYSTEM

被引：3

作者：

ISHIKAWA, T ^{[1
]}

CHAN, YC ^{[1
]}

NAKANO, Y ^{[1
]}

TADA, K ^{[1
]}

机构：

[1] UNIV TOKYO,DEPT ELECT ENGN,BUNKYO KU,TOKYO 113,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 03期

关键词：

AIGaAs; GRIN-SCH-SOW laser; Model-following control; Modern control theory; Molecular beam epitaxy; Temperature control;

D O I：

10.1143/JJAP.29.613

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A molecular beam epitaxy control system, whereby one microprocessor manages all the objects, has been constructed. The model-following algorithm, which is one of the applications of modern control theory, has been adopted instead of the conventional PID algorithm in order to improve the dynamic response of the temperature. It has been confirmed by computer simulation and measurement that the model-following algorithm is significantly effective especially when the set temperature is to be changed as a function of time. An application of the model-following algorithm to device fabrication has also been demonstrated. © 1990 The Japan Society of Applied Physics.

引用

页码：613 / 620

页数：8

共 6 条

[1] ULTRALOW-THRESHOLD GRADED-INDEX SEPARATE-CONFINEMENT SINGLE QUANTUM-WELL BURIED HETEROSTRUCTURE (AL,GA)AS LASERS WITH HIGH REFLECTIVITY COATINGS [J].

DERRY, PL ;

YARIV, A ;

LAU, KY ;

BARCHAIM, N ;

LEE, K ;

ROSENBERG, J .

APPLIED PHYSICS LETTERS, 1987, 50 (25) :1773-1775

[2] PRECISELY CONTROLLED COMPOSITIONAL GRADIENTS IN MBE GROWN AIGAAS/GAAS STRUCTURES [J].

HARBISON, JP ;

PETERSON, LD ;

LEVKOFF, J .

JOURNAL OF CRYSTAL GROWTH, 1987, 81 (1-4) :34-37

[3] MIGRATION-ENHANCED EPITAXY OF GAAS AND ALGAAS [J].

HORIKOSHI, Y ;

KAWASHIMA, M ;

YAMAGUCHI, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1988, 27 (02) :169-179

[4]

ISHIKAWA T, 1989, 1ST INT M ADV PROC C, P17

[5]

KANAI K, 1982, SEIGYO SHISUTEMU SEK, pCH6

[6] PHASE-LOCKED EPITAXY USING RHEED INTENSITY OSCILLATION [J].

SAKAMOTO, T ;

FUNABASHI, H ;

OHTA, K ;

NAKAGAWA, T ;

KAWAI, NJ ;

KOJIMA, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (09) :L657-L659

← 1 →