IRIDIUM OXIDE-BASED MICROELECTROCHEMICAL TRANSISTORS FOR PH SENSING

被引：56

作者：

PASZTOR, K ^{[1
]}

SEKIGUCHI, A ^{[1
]}

SHIMO, N ^{[1
]}

KITAMURA, N ^{[1
]}

MASUHARA, H ^{[1
]}

机构：

[1] RES DEV CORP JAPAN, MICROPHOTOCONVERS PROJECT, SODEGAURA, CHIBA 29902, JAPAN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 12卷 / 03期

关键词：

D O I：

10.1016/0925-4005(93)80023-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A study on electrochemically deposited iridium oxide films on Au wire and a pair of Au microelectrodes is reported. The open-circuit potential of the deposited film on an Au wire has been studied by a series of measurements. The pH sensitivity of the film is shown to be -64 to -66 mV/pH, while the relevant extrapolated potential at pH = 0 ranges from 0.67 to 0.71 V. Iridium oxide-based microelectrochemical transistors have also been fabricated. The resistance of the film on a pair of Au microelectrodes changes by 1.5 orders of magnitude from 300 to 8 MOMEGA as the gate voltage is stepped from -0.3 to 0.3 V. The response time of the device for chemical stimulation is less than 40 s and the device is demonstrated to be applicable as a pH sensor.

引用

页码：225 / 230

页数：6

共 17 条

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