POSSIBILITIES OF MODULATED CATHODOLUMINESCENCE FOR MULTILAYER STRUCTURE CHARACTERIZATION

被引：9

作者：

KIREEV, VA ^{[1
]}

RAZGONOV, II ^{[1
]}

YAKIMOV, EB ^{[1
]}

机构：

[1] RUSSIAN ACAD SCI,INST MICROELECTR TECHNOL & HIGH PUR MAT,CHERNOGOLOVKA 142432,RUSSIA

来源：

SCANNING | 1993年 / 15卷 / 01期

关键词：

SEMICONDUCTORS; CATHODOLUMINESCENCE;

D O I：

10.1002/sca.4950150105

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The basic principles of modulated cadiodoluminescence (MCL) are discussed herein, and the possibilities of die technique are demonstrated, using computer simulation of the MCL signal in a framework of simplified assumptions. Extension of the dependences obtained for less specific cases are discussed. The procedures for separation of the CL spectra associated with the different layers of two- and three-layer structures are also described.

引用

页码：31 / 36

页数：6

共 8 条

[1]

CHRISTEN J, 1989, REV PHYS APPL, V24, P85

[2] AN ANALYTICAL MODEL OF SEM AND STEM CHARGE COLLECTION IMAGES OF DISLOCATIONS IN THIN SEMICONDUCTOR LAYERS .1. MINORITY-CARRIER GENERATION, DIFFUSION, AND COLLECTION [J].

DONOLATO, C .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 65 (02) :649-658

[3] DETERMINATION OF KILOVOLT ELECTRON ENERGY DISSIPATION VS PENETRATION DISTANCE IN SOLID MATERIALS [J].

EVERHART, TE ;

HOFF, PH .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (13) :5837-&

[4]

HOLT DB, 1989, SEM MICROCHARACTERIZ, P372

[5]

KIREEV VA, 1989, ZH TEKH FIZ+, V59, P180

[6]

PETROV VI, 1988, POVERHNOST, V10, P5

[7] CATHODOLUMINESCENCE QUANTUM-WELL STUDIES [J].

WARWICK, CA .

JOURNAL DE PHYSIQUE IV, 1991, 1 (C6) :117-123

[8] INVESTIGATION OF MINORITY-CARRIER DIFFUSION LENGTHS BY ELECTRON-BOMBARDMENT OF SCHOTTKY BARRIERS [J].

WU, CJ ;

WITTRY, DB .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (05) :2827-2836

← 1 →