ELECTRON KINETICS OF WEAKLY IONIZED COLLISION-DOMINATED RF PLASMAS IN CO

被引：36

作者：

WINKLER, R

CAPITELLI, M

DILONARDO, M

GORSE, C

WILHELM, J

机构：

[1] UNIV BARI,CNR,CTR STUDIO CHIM PLASMI,I-70126 BARI,ITALY

[2] UNIV BARI,DEPARTIMENTO CHIM,I-70126 BARI,ITALY

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 04期

关键词：

D O I：

10.1007/BF00565555

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：437 / 456

页数：20

共 11 条

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[8] CONDUCTION AND DISPERSION OF IONIZED GASES AT HIGH FREQUENCIES [J].

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[9]

WINKLER R, 1985, ANN PHYS-LEIPZIG, V42, P537, DOI 10.1002/andp.19854970421

[10] ELECTRON KINETICS OF WEAKLY IONIZED HF PLASMAS .1. DIRECT TREATMENT AND FOURIER EXPANSION [J].

WINKLER, R ;

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WILKE, C .

BEITRAGE AUS DER PLASMAPHYSIK-CONTRIBUTIONS TO PLASMA PHYSICS, 1984, 24 (03) :285-302

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