OBSERVATION OF OVER-PRESSURIZED BUBBLES IN HELIUM-IRRADIATED ALUMINUM FILMS

被引:3
作者
DEBRAS, G [1 ]
GILLES, JM [1 ]
LUCAS, AA [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1979年 / 51卷 / 02期
关键词
D O I
10.1002/pssa.2210510230
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aluminium polycrystalline thin films implanted with high doses of He+ ions are studied by electron microscopy and by X‐ray and electron diffraction. With increasing He+ dose, the radius of the electron diffraction rings is observed to increase markedly indicating a homogeneous and isotropic decrease of the aluminium lattice parameter over the implanted region. The overall data seem to support the idea that most of the implanted He atoms precipitate into bubbles and subject the surrounding metal matrix to an average compression which, at higher doses, may reach several hundred kilobars. Copyright © 1979 WILEY‐VCH Verlag GmbH & Co. KGaA
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页码:559 / 565
页数:7
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