ECONOMICAL DEVICE FOR MEASURING THICKNESS OF A THIN POLYMER FILM

被引：6

作者：

HIRVI, K

MAKELA, T

PEKOLA, J

PAALANEN, M

机构：

[1] Laboratory of Applied Physics, Department of Physics, University of Jyväskylä, 40351 Jyväskylä

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 08期

关键词：

D O I：

10.1063/1.1144609

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An inexpensive device (about $2K) for thickness measurements of thin (<1 mu m) polymer films has been constructed. The homogeneous film is placed on a bulk substrate and three semiconductor lasers of different wavelengths are used to measure the reflectances at normal incidence. The thickness can be deduced with typically 4-8 nm uncertainty.

引用

页码：2735 / 2736

页数：2

共 5 条

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