A NOVEL ELECTRON-BEAM EVAPORATION TECHNIQUE FOR THE DEPOSITION OF SUPERCONDUCTING THIN-FILMS

被引：6

作者：

KRISHNA, MG

MURALIDHAR, GK

RAO, KN

RAO, GM

MOHAN, S

机构：

[1] Instrumentation and Services Unit, Indian Institute of Science, Bangalore

来源：

PHYSICA C | 1991年 / 175卷 / 5-6期

关键词：

D O I：

10.1016/0921-4534(91)90275-4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Superconducting thin films of BiSrCaCuO have been deposited using a novel electron beam evaporation technique. In this technique the crucible has a groove around its circumference and rotates continuously during deposition. The source material is loaded in the form of pellets of the composite. Both oxides as well as fluorides have been used in the starting material and a comparison of the film properties has been made. The best film was obtained on a MgO(100) substrate with a T(c) onset at 85 K and T(c) zero at 77 K using calcium fluoride in the source material.

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页码：623 / 626

页数：4

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