OPTICAL MONITORING OF NONQUARTERWAVE STACKS

被引:24
作者
VANDERLAAN, CJ
机构
来源
APPLIED OPTICS | 1986年 / 25卷 / 05期
关键词
D O I
10.1364/AO.25.000753
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:753 / 760
页数:8
相关论文
共 10 条
[1]   OPTICAL THIN-FILM MONITORING - RECENT ADVANCES AND LIMITATIONS [J].
BOUSQUET, P ;
PELLETIER, E .
THIN SOLID FILMS, 1981, 77 (1-3) :165-179
[2]  
HERMANN R, 1983, P SOC PHOTOOPT INSTR, V401, P83
[3]  
Macleod H., 2018, THIN FILM OPTICAL FI, V5th ed.
[4]   ERROR COMPENSATION MECHANISMS IN SOME THIN-FILM MONITORING SYSTEMS [J].
MACLEOD, HA ;
PELLETIER, E .
OPTICA ACTA, 1977, 24 (09) :907-930
[5]   TURNING VALUE MONITORING OF NARROW-BAND ALL-DIELECTRIC THIN-FILM OPTICAL FILTERS [J].
MACLEOD, HA .
OPTICA ACTA, 1972, 19 (01) :1-&
[6]   MONITORING OF OPTICAL COATINGS [J].
MACLEOD, HA .
APPLIED OPTICS, 1981, 20 (01) :82-89
[7]  
VANDERLAAN CJ, 1977, VACUUM, V27, P391, DOI 10.1016/0042-207X(77)90029-X
[8]  
VERMEULEN AJ, 1971, OPT ACTA, V18, P351
[9]   NON-QUARTERWAVE MULTILAYER FILTERS - OPTICAL MONITORING WITH A MINICOMPUTER ALLOWING CORRECTION OF THICKNESS ERRORS [J].
VIDAL, B ;
PELLETIER, E .
APPLIED OPTICS, 1979, 18 (22) :3857-3862
[10]   WIDEBAND OPTICAL MONITORING OF NON-QUARTERWAVE MULTILAYER FILTERS [J].
VIDAL, B ;
FORNIER, A ;
PELLETIER, E .
APPLIED OPTICS, 1979, 18 (22) :3851-3856