CAPACITANCE-TO-PHASE ANGLE CONVERSION FOR THE DETECTION OF EXTREMELY SMALL CAPACITIES

被引：48

作者：

WOLFFENBUTTEL, RF

REGTIEN, PPL

机构：

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1987年 / 36卷 / 04期

关键词：

D O I：

10.1109/TIM.1987.6312572

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：868 / 872

页数：5

共 12 条

[1]

CHAU HL, 1985, JUN TRANSD 85 PHIL, P174

[2]

CHUN KJ, 1985, JUN P TRANSD 85 IEEE, P22

[3] AN INTEGRATED CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT [J].

HANNEBORG, A ;

HANSEN, TE ;

OHLCKERS, PA ;

CARLSON, E ;

DAHL, B ;

HOLWECH, O .

SENSORS AND ACTUATORS, 1986, 9 (04) :345-351

[4]

KLAASSEN KB, 1982, SENSOR ACTUATOR, V3, P209

[5]

Ko W. H., 1983, Sensors and Actuators, V4, P403, DOI 10.1016/0250-6874(83)85051-3

[6] MINIATURE FREQUENCY-OUTPUT TEMPERATURE TRANSMITTER BASED ON A CERAMIC CAPACITIVE SENSOR [J].

LEPPAVUORI, S ;

NIEMELA, P ;

PIILA, T ;

UUSIMAKI, A .

SENSORS AND ACTUATORS, 1983, 4 (04) :573-580

[7] MICROMECHANICAL ACCELEROMETER INTEGRATED WITH MOS DETECTION CIRCUITRY [J].

PETERSEN, KE ;

SHARTEL, A ;

RALEY, NF .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (01) :23-27

[8] SOLID-STATE HUMIDITY SENSORS [J].

REGTIEN, PPL .

SENSORS AND ACTUATORS, 1981, 2 (01) :85-95

[9] A MICROMECHANICAL CAPACITIVE ACCELEROMETER WITH A 2-POINT INERTIAL-MASS SUSPENSION [J].

RUDOLF, F .

SENSORS AND ACTUATORS, 1983, 4 (02) :191-198

[10] A MONOLITHIC CAPACITIVE PRESSURE SENSOR WITH PULSE-PERIOD OUTPUT [J].

SANDER, CS ;

KNUTTI, JW ;

MEINDL, JD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (05) :927-930

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