CONCENTRATION PROFILE RECONSTITUTION FROM RUTHERFORD BACKSCATTERING SPECTRA

被引：15

作者：

SERRUYS, Y

TIRIRA, J

CALMON, P

机构：

[1] FAC UNIV NOTRE DAME PAIX,LARN,B-5000 NAMUR,BELGIUM

[2] CENS,STA,DTM,CEREM,DTA,F-91191 GIF SUR YVETTE,FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 74卷 / 04期

关键词：

D O I：

10.1016/0168-583X(93)95956-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This paper presents a novel iterative method for concentration profile extraction from Rutherford backscattering spectra, which allows interpretation up to the best depth resolution allowed by experimental data, without resorting to the usual assumptions underlying existing methods. The description of the method is followed by discussion of its convergence, accuracy and limitations comparison with classical methods on the basis of experimental examples.

引用

页码：565 / 572

页数：8

共 18 条

[1] INFLUENCE OF ARSENIC ION-BEAM MIXING ON PALLADIUM SILICIDE FORMATION [J].

BIBIC, N ;

MILOSAVLJEVIC, M ;

PERUSKO, D ;

SERRUYS, Y .

THIN SOLID FILMS, 1990, 193 (1-2) :248-257

[2]

BIBIC N, 1993, IN PRESS VACUUM

[3] A MONTE-CARLO COMPUTER-PROGRAM FOR THE TRANSPORT OF ENERGETIC IONS IN AMORPHOUS TARGETS [J].

BIERSACK, JP ;

HAGGMARK, LG .

NUCLEAR INSTRUMENTS & METHODS, 1980, 174 (1-2) :257-269

[4]

CALMON P, 1991, THESIS U PARIS S ORS

[5]

CALMON P, 1992, E MRS S P, V29, P33

[6]

CALMON P, 1991, CEA R5560 REP

[7]

CHU WK, 1978, BACKSCATTERING SPECT, P85

[8]

IBBIC N, 1992, NUCL INSTRUM METH B, V67, P500

[9] HOW ACCURATE ARE ABSOLUTE RUTHERFORD BACKSCATTERING YIELDS [J].

LECUYER, J ;

DAVIES, JA ;

MATSUNAMI, N .

NUCLEAR INSTRUMENTS & METHODS, 1979, 160 (02) :337-346

[10]

MAUGIS P, IN PRESS

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