CHEMICAL VAPOR-DEPOSITION OF TIB2 ON GRAPHITE

被引：45

作者：

PIERSON, HO

RANDICH, E

MATTOX, DM

机构：

[1] Sandia Laboratories, Albuquerque

来源：

JOURNAL OF THE LESS-COMMON METALS | 1979年 / 67卷 / 02期

关键词：

Compendex;

D O I：

10.1016/0022-5088(79)90016-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this paper we describe an experimental investigation of the coating of graphite with TiB2 by chemical vapor deposition using the H2 reduction of BCl3 and TiCl4 at 925 °C and 1 atm. Reasonable matching of the thermal expansion of TiB2 and graphite was necessary to eliminate cracking. A suitable graphite was POCO DFP-1. Adhesion was improved by using a slightly rough graphite surface. Heat treatment at 2000 °C and above resulted in a certain degree of diffusion. No melting or solid phases other than TiB2 and graphite were detected up to 2400 °C. The coatings showed no failure when repeatedly submitted to an electron beam pulse of 2 kW cm-2 for 0.8 s. © 1979.

引用

页码：381 / 388

页数：8

共 12 条

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[9] PIERSON HO, 1979, THIN SOLID FILMS, V54, P119
[10] RANDICH E, 1978, 3RD P ANN C MAT COAL

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