ION-BEAM MODIFICATION OF METALS

被引:59
作者
DEARNALEY, G
机构
关键词
D O I
10.1016/0168-583X(90)90382-5
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Energetic ions beams may be used in various ways to modify and so improve the tribological properties of metals. These methods include: - ion implantation of selected additive species; - ion beam mixing of thin deposited coatings; - ion-beam-assisted deposition of thicker overlay coatings. The first of these techniques has been widely used to modify the electronic properties of semiconductors, but has since been extended for the treatment of all classes of material. Tool steels can be strengthened by the ion implantation of nitrogen or titanium, to produce fine dispersions of hard second-phase precipitates. Solid solution strengthening, by combinations of substitutional and interstitial species, such as yttrium and nitrogen, has also been successful. Both ion beam mixing (IBM) and ion-beam-assisted deposition (IBAD) use a combination of coating and ion bombardment. In the first case, the objective is to intermix the coating and substrate by the aid of radiation-enhanced diffusion. In the latter case, the coating is densified and modified during deposition and the process can be continued in order to build up overlay coatings several μm in thickness. The surface can then be tailored, for instance to provide a hard and adherent ceramic such as silicon nitride, boron nitride or titanium nitride. It is an advantage that all the above processes can be applied at relatively low temperatures, below about 200° C, thereby avoiding distortion of precision components. Ion implantation is also being successfully applied for the reduction of corrosion, especially at high temperatures or in the atmosphere and to explore the mechanisms of oxidation. Ion-assisted coatings, being compact and adherent, provide a more substantial protection against corrosion: silicon nitride and boron nitride are potentially useful in this respect. Examples will be given of the successful application of these methods for the surface modification of metals and alloys, and developments in the equipment now available for industrial application of ion beams will also be reviewed. © 1990.
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页码:358 / 367
页数:10
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