MICROIMAGING AND OFF-LINE MICROSCOPY OF FINE PARTICLES AND INCLUSIONS

Characterization of large numbers of fine particles or inclusions is of increasing importance to assist in (1) evaluating metal or ceramic powders as candidates for compaction or use in composite materials, (2) monitoring environmental effects of particles produced in manufacturing processes and (3) identifying trace contaminants in engineering materials. These properties are best studied by either optical or electron microscopy, but a need to describe them in statistically significant terms places a burden on manual microscopy techniques. A technique called computer-controlled scanning electron microscopy (CCSEM) was developed in the late 1970s to overcome operator bias and to characterize large numbers of individual features by size, shape factor and elemental composition in a short period of time. An advancement of CCSEM technology, microimaging, is a technique used to collect images in an automated manner during a CCSEM analysis. This paper discusses recent advances in CCSEM and personal computer technology which make possible the collection and storage of images during CCSEM analysis. © 1990.