PHOTON-CONTROLLED FABRICATION OF AMORPHOUS SUPERLATTICE STRUCTURES USING ARF (193 NM) EXCIMER LASER PHOTOLYSIS

被引：14

作者：

LOWNDES, DH

GEOHEGAN, DB

ERES, D

PENNYCOOK, SJ

MASHBURN, DN

JELLISON, GE

机构：

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 22期

关键词：

D O I：

10.1063/1.99732

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1868 / 1870

页数：3

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