IMPROVED ACCURACY OF THE LASER DIFFRACTION TECHNIQUE FOR DIAMETER MEASUREMENT OF SMALL FIBERS

被引：26

作者：

LI, CT

TIETZ, JV

机构：

[1] Dow Corning Corporation, Midland, 48686, Michigan

来源：

JOURNAL OF MATERIALS SCIENCE | 1990年 / 25卷 / 11期

关键词：

D O I：

10.1007/BF01129926

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The accuracy of a laser diffraction technique has been improved for small fibre diameter measurement by a calibration with SEM-measured internal standards. The calibration showed that the laser diameter is about 5% larger than the corresponding SEM diameter. After correction for systematic error via accurate calibration, the laser technique was found to be fast and capable of attaining a diameter measurement accuracy of 0.1μm. © 1990 Chapman and Hall Ltd.

引用

页码：4694 / 4698

页数：5