NEGATIVE ION-CONTAINING PLASMA IN PARALLEL-PLATE RADIOFREQUENCY DISCHARGE IN OXYGEN

被引：23

作者：

AMEMIYA, H ^{[1
]}

YASUDA, N ^{[1
]}

ENDOU, M ^{[1
]}

机构：

[1] CHUO UNIV,FAC ENGN,BUNKYO KU,TOKYO 112,JAPAN

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1994年 / 14卷 / 03期

关键词：

SYMMETRICAL RF DISCHARGE; NEGATIVE IONS; ION TEMPERATURE; OXYGEN;

D O I：

10.1007/BF01447079

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

The properties of a plasma in a parallel-plate radio-frequency (rf) symmetric discharge of 13.56 MHz in oxygen have been investigated. The plasma contains negative ions. The temperature and density of the negative ions have been determined from the slope and height of the semilog-plotted second derivative of the probe characteristics. The laser photodetachment technique is applied, and data indicating the existence of negative ions are obtained. The negative ion densities deduced by both methods are comparable. The negative ton temperature is found to be from 0.1 to 0.6 eV, depending on the pressure and rf power density. The electron energy distribution f(E) deviates from Maxwellian and has a depletion of low-energy parts, which may be due to the loss of low-energy electrons in attachments. A shifted annular-shaped distribution is fitted to the measured f(E), and the data analysis is made according to this form of f(E).

引用

页码：209 / 227

页数：19

共 22 条

[1] PLASMAS WITH NEGATIVE-IONS - PROBE MEASUREMENTS AND CHARGE EQUILIBRIUM [J].