DEPTH SELECTIVE CEMS APPLIED TO THE EXAMINATION OF THE CONDITIONS IN VACUUM-SYSTEMS

被引:2
作者
BODLUNDRINGSTROM, B
BAVERSTAM, U
BOHM, C
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 04期
关键词
D O I
10.1116/1.570131
中图分类号
O59 [应用物理学];
学科分类号
摘要
Depth selective CEMS has been used to study surface contaminations on iron in vacuum systems. In an oil-diffusion-pumped system iron carbonate was found after iron was annealed at 750 degree C for several hours. In a turbopumped system austenite was formed after annealing, following a long pumping period and repeated successful reduction-oxidation cycles. The depth distributions were determined with rather good accuracy.
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页码:1013 / 1016
页数:4
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