USING LIGHT AS A LENS FOR SUBMICRON, NEUTRAL-ATOM LITHOGRAPHY

被引：355

作者：

TIMP, G ^{[1
]}

BEHRINGER, RE ^{[1
]}

TENNANT, DM ^{[1
]}

CUNNINGHAM, JE ^{[1
]}

PRENTISS, M ^{[1
]}

BERGGREN, KK ^{[1
]}

机构：

[1] HARVARD UNIV,CAMBRIDGE,MA 02138

来源：

PHYSICAL REVIEW LETTERS | 1992年 / 69卷 / 11期

关键词：

D O I：

10.1103/PhysRevLett.69.1636

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We show that light can be used as a lens to focus a collimated neutral atomic beam to submicron dimensions during deposition onto a substrate. We have used an optical standing wave at 589 nm as an array of cylindrical lenses to focus a perpendicular sodium beam into a grating on a substrate, with a periodicity of 294.3 +/- 0.3 nm. This result is the first direct evidence of submicron focusing of atoms by light, and represents a fundamentally new scheme for submicron lithography.

引用

页码：1636 / 1639

页数：4

共 9 条

[1] BIGELOW NP, 1990, PHYS REV LETT, V65, P28
[2] OBSERVATION OF FOCUSING OF NEUTRAL ATOMS BY DIPOLE FORCES OF RESONANCE-RADIATION PRESSURE
BJORKHOLM, JE
FREEMAN, RR
ASHKIN, A
PEARSON, DB
[J]. PHYSICAL REVIEW LETTERS, 1978, 41 (20) : 1361 - 1364
[3] IMAGING AND FOCUSING OF ATOMS BY A FRESNEL ZONE PLATE
CARNAL, O
SIGEL, M
SLEATOR, T
TAKUMA, H
MLYNEK, J
[J]. PHYSICAL REVIEW LETTERS, 1991, 67 (23) : 3231 - 3234
[4] CASTIN Y, 1990, IN PRESS MAY LIKE P
[5] 3-DIMENSIONAL VISCOUS CONFINEMENT AND COOLING OF ATOMS BY RESONANCE RADIATION PRESSURE
CHU, S
HOLLBERG, L
BJORKHOLM, JE
CABLE, A
ASHKIN, A
[J]. PHYSICAL REVIEW LETTERS, 1985, 55 (01) : 48 - 51
[6] MOTION OF ATOMS IN A RADIATION TRAP
GORDON, JP
ASHKIN, A
[J]. PHYSICAL REVIEW A, 1980, 21 (05): : 1606 - 1617
[7] DIFFRACTION OF AN ATOMIC-BEAM BY STANDING-WAVE RADIATION
MOSKOWITZ, PE
GOULD, PL
ATLAS, SR
PRITCHARD, DE
[J]. PHYSICAL REVIEW LETTERS, 1983, 51 (05) : 370 - 373
[8] LASER COOLING AND ELECTROMAGNETIC TRAPPING OF NEUTRAL ATOMS
PHILLIPS, WD
PRODAN, JV
METCALF, HJ
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1985, 2 (11) : 1751 - 1767
[9] CHANNELING ATOMS IN A LASER STANDING WAVE
SALOMON, C
DALIBARD, J
ASPECT, A
METCALF, H
COHENTANNOUDJI, C
[J]. PHYSICAL REVIEW LETTERS, 1987, 59 (15) : 1659 - 1662

← 1 →