REAL-TIME OPTICAL CHARACTERIZATION OF SURFACE ACOUSTIC MODES OF POLYIMIDE THIN-FILM COATINGS

被引：97

作者：

DUGGAL, AR

ROGERS, JA

NELSON, KA

机构：

[1] Department of Chemistry, Massachusetts Institute of Technology, Cambridge

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 07期

关键词：

D O I：

10.1063/1.351535

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (approximately 1 mum) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

引用

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页码：2823 / 2839

页数：17

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